Fundamentals of semiconductor fabrication / Gary S. May and Simon M. Sze.

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NJ : Wiley, c2004NJ : Wiley, c2004Description: xiii, 305 p. : ill. ; 26 cmISBN:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Print Materials	Main Library Engineering	621.38152/M466 2004 (Browse shelf(Opens below))	Available		0095457

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